Stability under humidity, UV-light and bending of AZO films deposited by ALD on Kapton

Citation:
Marques, A. C., J. Faria, P. Perdigão, B. M. M. Faustino, R. Ritasalo, K. Costabello, R. C. da Silva, and I. Ferreira, "Stability under humidity, UV-light and bending of AZO films deposited by ALD on Kapton", Scientific Reports, vol. 9, pp. 17919, 2019.