Sintering Behavior of Nano- and Micro-Sized ZnO Powder Targets for rf Magnetron Sputtering Applications | invisible

Sintering Behavior of Nano- and Micro-Sized ZnO Powder Targets for rf Magnetron Sputtering Applications

Citation:: Neves, N, Barros R, Antunes E, Ferreira I, Calado J, Fortunato E, Martins R. 2012. Sintering Behavior of Nano- and Micro-Sized ZnO Powder Targets for rf Magnetron Sputtering Applications. J. Am. Ceram. Soc.. 95:204-210.