Low-temperature sputtered mixtures of high-kappa and high bandgap dielectrics for GIZO TFTs

Citation:
Barquinha, P, Pereira L, Goncalves G, Kuscer D, Kosec M, Vila A, Olziersky A, Morante JR, Martins R, Fortunato E.  2010.  Low-temperature sputtered mixtures of high-kappa and high bandgap dielectrics for GIZO TFTs. J. Soc. Inf. Disp. . 18