Insight on the SU-8 resist as passivation layer for transparent Ga2O3-In2O3-ZnO thin-film transistors

Citation:
Olziersky, A, Barquinha P, Vila A, Pereira L, Goncalves G, Fortunato E, Martins R, Morante JR.  2010.  Insight on the SU-8 resist as passivation layer for transparent Ga2O3-In2O3-ZnO thin-film transistors. J. Appl. Phys.. 108(064505)